The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Jul. 13, 2014
Wayne O. Duescher, Roseville, MN (US);
Cameron M. Duescher, Maplewood, MN (US);
Wayne O. Duescher, Roseville, MN (US);
Cameron M. Duescher, Maplewood, MN (US);
Other;
Abstract
Hard-material, flat-surfaced workpieces such as semiconductor wafers or sapphire disks are quickly attached with vacuum to a rotatable floating workpiece carrier. Fluid pressure in a sealed chamber applies uniform abrading pressure over the full abraded surface of the workpieces. A flexible diaphragm is used to form the sealed chamber and the carrier is rotationally driven by a lug-pin device. The floating carrier is horizontally restrained by a center-post device that provides rigid lateral support against abrading forces. Tilting of the floating carrier is provided by a spherical bearing. The abrading system can be operated at the very high abrading speeds used in high speed flat lapping with raised-island abrasive disks. Vacuum can also be applied to the sealed chamber to quickly move the workpiece away from the abrading surface. A mode of providing rigid parallel-surface abrading of a workpiece can be activated by simply applying vacuum to the sealed chamber.