The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 2015

Filed:

Apr. 28, 2011
Applicants:

Beung-hwa Jeong, Yongin, KR;

Kwang-nam Kim, Yongin, KR;

Inventors:

Beung-Hwa Jeong, Yongin, KR;

Kwang-Nam Kim, Yongin, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B08B 3/02 (2006.01); B08B 3/04 (2006.01); H01L 21/67 (2006.01); B08B 5/02 (2006.01);
U.S. Cl.
CPC ...
B08B 3/041 (2013.01); B08B 3/022 (2013.01); B08B 5/02 (2013.01); H01L 21/67028 (2013.01); H01L 21/67051 (2013.01);
Abstract

A substrate cleaning system including a carrying unit having a plurality of rollers for carrying a substrate, wherein each of the rollers includes a roller shaft and a plurality of division rollers coupled to the roller shaft, and wherein a gap between adjacent ones of the roller shafts is larger than a radius of each of the division rollers; a first rinse unit located along the carrying unit and configured to apply a first cleaning liquid onto the substrate; and a cleaning unit comprising a slit nozzle and configured to apply a second cleaning liquid to the substrate after it encounters the first rinse unit.


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