The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Feb. 10, 2014
Applicant:
Nivarox-far S.a., Le Locle, CH;
Inventors:
Alexandre Fussinger, Wavre, CH;
Marc Stranczl, Nyon, CH;
Assignee:
Nivarox-FAR S.A., Le Locle, CH;
Primary Examiner:
Int. Cl.
CPC ...
G04B 15/14 (2006.01); H03H 3/00 (2006.01); B81C 99/00 (2010.01); C23F 1/02 (2006.01); H03H 3/007 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
H03H 3/0072 (2013.01); B81C 99/008 (2013.01); G03F 7/00 (2013.01); G04B 15/14 (2013.01); B81B 2201/035 (2013.01); G03F 7/0002 (2013.01); Y10T 29/49002 (2015.01);
Abstract
The invention relates to a method of fabricating a single-piece micromechanical component including at least two distinct functional levels. According to the invention, the method includes a LIGA process on a single level combined with the machining of the LIGA deposition directly on the substrate.