The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9196284 B1

Date of Patent:

Nov. 24, 2015

Filed:

Nov. 15, 2010

In-line type film forming apparatus and method for manufacturing magnetic recording medium

Applicant:

Satoru Ueno, Chiba, JP;

Inventor:

Satoru Ueno, Chiba, JP;

Assignee:

SHOWA DENKO K.K., Tokyo, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Rudy Zervigon

Int. Cl.

CPC ...

G11B 5/85 (2006.01); C23C 14/50 (2006.01); C23C 14/56 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); C23C 16/54 (2006.01); C23C 16/44 (2006.01);

U.S. Cl.

CPC ...

G11B 5/85 (2013.01); C23C 14/50 (2013.01); C23C 14/568 (2013.01); C23C 16/4401 (2013.01); C23C 16/4412 (2013.01); C23C 16/54 (2013.01); H01L 21/67017 (2013.01); H01L 21/67069 (2013.01); H01L 21/67748 (2013.01); H01L 21/67751 (2013.01);

Abstract

There is provided an in-line type film-forming apparatus that can prevent a substrate from being dropped out of a carrier and convey the carrier at high speed. A first supporting member () is supported to be displaceable in a direction along an attaching face (S) of the support base () in accordance with the growth of the first supporting member () due to thermal expansion in a horizontal direction, a second supporting member () is supported to be displaceable in a direction negating the growth of the first supporting member () due to thermal expansion in the horizontal direction along an attaching face (S) of the first supporting member () in accordance with the growth of the second supporting member () due to thermal expansion in the horizontal direction, and a holder () is supported to be displaceable in a direction negating the growth of the first and second supporting members () and () due to thermal expansion in the vertical direction along an attaching face (S) of the third supporting member () in accordance with the growth of the holder () due to thermal expansion in the vertical direction.

Find Patent Forward Citations

Ueno, Satoru. (2015). In-line type film forming apparatus and method for manufacturing magnetic recording medium (U.S. Patent No. 9196284). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9196284

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