The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Mar. 13, 2013
Freescale Semiconductor, Inc., Austin, TX (US);
Yizhen Lin, Cohoes, NY (US);
Dejan Mijuskovic, Tournefeuille, FR;
FREESCALE SEMICONDUCTOR, INC., Austin, TX (US);
Abstract
An angular rate sensor () includes a single drive mass () and distributed sense masses () located within a central opening () of the drive mass (). The drive mass () is enabled to rotate around the Z-axis () under electrostatic stimulus. The sense masses () are coupled to the drive mass by spring elements () such that oscillatory rotary motion () of the drive mass imparts a linear drive motion () on the sense masses. The distributed sense masses form two pairs of sense masses, where one pair senses X- and Z-axis angular rate and the other pair senses Y- and Z-axis angular rate. The sense masses are coupled to one another via a centrally located coupler element () to ensure that the sense masses of each pair are moving in anti-phase.