The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Nov. 19, 2012
Nikon Corporation, Tokyo, JP;
Hiroshi Aoki, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
There is provided a form measuring apparatus including: a projection section configured to project a plurality kinds of patterns onto a measuring object in sequence, the plurality kinds of patterns having a common repetitive structure and differing in phase; an imaging section configured to acquire an image data set by taking an image of the measuring object every time each of the plurality kinds of patterns is projected onto the measuring object; a selecting section configured to select a data set as an adequate data set from the acquired image data set, the data set concerning an identical area on the measuring object, and all data in the set falling within an effective brightness range; and a form calculating section configured to find a form of the area as a basis of acquiring the adequate data on the measuring object, based on the selected adequate data set.