The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 24, 2015

Filed:

Feb. 05, 2010
Applicants:

Arne Hoppe, Herne, DE;

Alexey Merkulov, Ludwigshafen, DE;

Juergen Steiger, Duesseldorf, DE;

Duy VU Pham, Oberhausen, DE;

Yvonne Damaschek, Recklinghausen, DE;

Heiko Thiem, Bensheim, DE;

Inventors:

Arne Hoppe, Herne, DE;

Alexey Merkulov, Ludwigshafen, DE;

Juergen Steiger, Duesseldorf, DE;

Duy Vu Pham, Oberhausen, DE;

Yvonne Damaschek, Recklinghausen, DE;

Heiko Thiem, Bensheim, DE;

Assignee:

Evonik Degussa GmbH, Essen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/40 (2006.01); H01L 21/44 (2006.01); C23C 18/12 (2006.01);
U.S. Cl.
CPC ...
C23C 18/1216 (2013.01);
Abstract

The present invention relates to a process for producing semiconductive indium oxide layers, in which a substrate is coated with a liquid, anhydrous composition comprising a) at least one indium alkoxide and b) at least one solvent, optionally dried and thermally treated at temperatures greater than 250° C., to the layers producible by this process, and to the use thereof.


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