The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Sep. 21, 2010
Applicants:
Takashi Matsuno, Hyogo, JP;
Osamu Takemura, Hyogo, JP;
Inventors:
Takashi Matsuno, Hyogo, JP;
Osamu Takemura, Hyogo, JP;
Assignee:
Sumitomo Precision Products Co., Ltd., Hyogo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01J 19/08 (2006.01); C01B 13/11 (2006.01);
U.S. Cl.
CPC ...
C01B 13/11 (2013.01); C01B 2201/32 (2013.01); C01B 2201/34 (2013.01); C01B 2201/64 (2013.01); C01B 2201/90 (2013.01);
Abstract
A dielectricis provided on each of opposing surfaces of a pair of electrodes. Discharge gapscommunicating with a raw material gas supply path and an ozone gas removal path are formed between the pair of dielectrics. A functional filmis formed on each of the pair of dielectricsso as to face the discharge gaps. The functional filmcontains a first metal oxide of one or more metals selected from a group consisting of niobium, tantalum, molybdenum, and chromium, and a second metal oxide of one or more metals selected from a group consisting of titanium, tungsten, zinc, and iron.