The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
Oct. 05, 2012
Texas Instruments Incorporated, Dallas, TX (US);
Arun Kumar Gupta, Dallas, TX (US);
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Abstract
A MEMS mixer filter including an array of a multiplicity of resonator elements with conductive outer surfaces in a coplanar rectangularly tiled array, and two sets of DC bias lines in which alternating resonator elements in each row and column are connected to one or the other sets of bias lines so that laterally adjacent resonators may be biased to a DC potential. The resonator elements are uniform in size and shape. Lateral dimensions of the resonator elements are between 5 and 50 microns. The resonator elements are between 100 nanometers and 100 microns thick, and adjacent resonator elements are separated by a gap between 100 and 500 nanometers. A process of forming the MEMS mixer filter.