The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
Mar. 19, 2014
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Takahiko Yoshizawa, Sakata, JP;
Assignee:
SEIKO EPSON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03B 5/30 (2006.01); H01L 21/768 (2006.01); B81C 1/00 (2006.01); H03B 5/32 (2006.01);
U.S. Cl.
CPC ...
H03B 5/30 (2013.01); B81C 1/00246 (2013.01); B81C 1/00801 (2013.01); H01L 21/76802 (2013.01); B81C 2201/014 (2013.01); B81C 2203/0742 (2013.01); B81C 2203/0764 (2013.01); H03B 5/32 (2013.01);
Abstract
An electronic device according to an aspect of the invention include: a substrate; an underlayer having an opening and being formed on the substrate; a functional element provided on the underlayer; and a surrounding wall forming a cavity that accommodates the functional element, at least a part of the surrounding wall being disposed in the opening.