The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
May. 31, 2013
Applicant:
Korea Institute of Science and Technology, Seoul, KR;
Inventors:
Jin-Dong Song, Seoul, KR;
Eunhye Lee, Seoul, KR;
Min Hwan Bae, Chungcheongnam-do, KR;
Won Jun Choi, Seoul, KR;
Jae Jin Yoon, Incheon, KR;
Il Ki Han, Seoul, KR;
Assignee:
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY, Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 31/0216 (2014.01); H01L 33/44 (2010.01);
U.S. Cl.
CPC ...
H01L 31/02168 (2013.01); H01L 33/44 (2013.01);
Abstract
In an aspect of the present disclosure, there is disclosed a manufacture method of an antireflection coating using a self-assembly nano structure, which includes forming a first metal droplet on a substrate by means of droplet epitaxy, depositing a first non-metal on the formed first metal droplet, and forming a first nano compound crystal by means of self-assembly of the deposited first non-metal and the first metal droplet.