The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
Mar. 20, 2014
Nissin Ion Equipment Co., Ltd., Kyoto-shi, Kyoto, JP;
Masakazu Adachi, Kyoto, JP;
NISSIN ION EQUIPMENT CO., LTD., Kyoto, JP;
Abstract
An electrostatic chuck system comprising a chuck bodyhaving a clamping facefor electrostatically clamping a substrate, an electrode portiongenerating a clamping force on the clamping face, a temperature-regulating portionregulating the temperature of the substrateto maintain it at a predetermined level, and a controllercontrolling the voltage applied to the electrode portion, wherein, prior to completion of the electrostatic clamping of the substrateto the chuck body, a voltage waveform obtained by superimposing a first waveform, which changes in a stepwise, rectilinear, or quadratic manner between a first level and a second level having a larger absolute value than the first level, and a periodic second waveform, which may be any of a rectangular wave, a triangular wave, a saw-tooth wave, or a sine wave, is applied by the controllerto the electrode portion