The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
Aug. 22, 2013
Boe Technology Group Co., Ltd., Beijing, CN;
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Abstract
A developing apparatus comprises: a photodetection unit, which emits detecting light toward the development area of the substrate to be developed within a scheduled time after the substrate to be developed is immersed into the developer solution; and a processing unit electrically coupled with the photodetection unit for determining the time interval which it takes for development to occur in the development area by means of the detecting light, and for determining that the developer solution is failed if the development time interval is determined to be out of the preset time range. A method for monitoring the developer solution is also provided.