The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 17, 2015

Filed:

Mar. 24, 2014
Applicant:

Hitachi High-tech Science Corporation, Minato-ku, Tokyo, JP;

Inventors:

Masahiro Sakuta, Tokyo, JP;

Kiyoshi Hasegawa, Tokyo, JP;

Yoshiki Matoba, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/64 (2006.01); G01N 23/223 (2006.01);
U.S. Cl.
CPC ...
G01N 23/223 (2013.01); G01N 2223/317 (2013.01); G01N 2223/652 (2013.01);
Abstract

An X-ray fluorescence analyzer includes a sample stage having an opening at an X-ray irradiation position, an X-ray source which irradiates a sample placed on the opening with a primary X-ray from below, a detector which detects an X-ray fluorescence generated from the sample, a transparent drop prevention plate supported to be advanced and retracted immediately below the opening, a drive mechanism which advances and retracts the drop prevention plate, an observation camera which observes the drop prevention plate positioned immediately below the opening, and an operation unit which processes an image of the drop prevention plate which is captured by the observation camera. The operation unit detects a foreign matter on the drop prevention plate based on an image difference between images before and after the drive mechanism moves or vibrates the drop prevention plate within an observation range of the observation camera.


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