The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
Jan. 11, 2012
Isao Shimoyama, Tokyo, JP;
Kiyoshi Matsumoto, Tokyo, JP;
Tomoyuki Takahata, Tokyo, JP;
Tetsuo Kan, Tokyo, JP;
Kenta Kuwana, Tokyo, JP;
Hidetoshi Takahashi, Tokyo, JP;
Minh-dung Nguyen, Tokyo, JP;
Isao Shimoyama, Tokyo, JP;
Kiyoshi Matsumoto, Tokyo, JP;
Tomoyuki Takahata, Tokyo, JP;
Tetsuo Kan, Tokyo, JP;
Kenta Kuwana, Tokyo, JP;
Hidetoshi Takahashi, Tokyo, JP;
Minh-Dung Nguyen, Tokyo, JP;
The University of Tokyo, Tokyo, JP;
Abstract
There is provided a differential pressure sensor capable of measuring a pressure fluctuation with a simple structure. The differential pressure sensor includes a main body formed with an air chamber, and an opening that causes an interior of the air chamber to be in communication with an exterior, and a detector provided at the opening. The detector includes a cantilever provided in a manner tiltable so as to block off the opening, and the cantilever is formed with a Piezo resistor layer.