The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
Mar. 26, 2014
Applicant:
Korea Institute of Science and Technology, Seoul, KR;
Inventors:
Young Min Jhon, Seoul, KR;
Yong Soo Kim, Seoul, KR;
Min Ah Seo, Seoul, KR;
Jae Hun Kim, Seoul, KR;
Min Chul Park, Seoul, KR;
Sun Ho Kim, Seoul, KR;
Deok Ha Woo, Seoul, KR;
Seok Lee, Seoul, KR;
Taik Jin Lee, Seoul, KR;
Myung Suk Chun, Seoul, KR;
Woon Jo Cho, Gyeonggi-do, KR;
Assignee:
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY, Seoul, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/02 (2006.01);
U.S. Cl.
CPC ...
G01J 3/0297 (2013.01);
Abstract
Provided are an apparatus and method for calibrating an extreme ultraviolet (EUV) spectrometer in which a wavelength of a spectrum of EUV light used for EUV lithography and mask inspection technology can be measured accurately.