The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 17, 2015

Filed:

Aug. 11, 2009
Applicants:

Scott Wayne Priddy, Saint Louis Park, MN (US);

Richard Charles Bresnahan, Cottage Grove, MN (US);

Inventors:

Scott Wayne Priddy, Saint Louis Park, MN (US);

Richard Charles Bresnahan, Cottage Grove, MN (US);

Assignee:

Veeco Instruments Inc., Plainview, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 14/24 (2006.01); C23C 14/06 (2006.01);
U.S. Cl.
CPC ...
C23C 14/243 (2013.01); C23C 14/0623 (2013.01);
Abstract

The present invention provides deposition sources that can efficiently and controllably provide vaporized material for deposition of thin film materials. Deposition sources described herein can be used to deposit any desired material and are particularly useful for depositing high melting point materials at high evaporation rates. An exemplary application for deposition sources of the present invention is deposition of copper, indium, and gallium in the manufacture of copper indium gallium diselenide based photovoltaic devices.


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