The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
Jun. 14, 2011
Matthias Smolke, Leipzig, DE;
Matthias Klooss, Dresden, DE;
Andrej Wolf, Dresden, DE;
Johannes Struempfel, Dresden, DE;
Matthias Smolke, Leipzig, DE;
Matthias Klooss, Dresden, DE;
Andrej Wolf, Dresden, DE;
Johannes Struempfel, Dresden, DE;
VON ARDENNE GmbH, Dresden, DE;
Abstract
A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first submodule, is arranged in a first module and provided with an outer interface which is the same for at least a second module.