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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9184371 B1

PDFFull Text
Date of Patent:
Nov. 10, 2015

Filed:

Dec. 31, 2012

Piezoelectric thin film, method for manufacturing same, inkjet head, method for forming image using inkjet head, angular velocity sensor, method for measuring angular velocity using angular velocity sensor, piezoelectric power generation element, and method for generating power using piezoelectric power generation element

Applicant:

Panasonic Corporation, Osaka, JP;

Inventors:

Takakiyo Harigai, Osaka, JP;

Yoshiaki Tanaka, Nara, JP;

Hideaki Adachi, Osaka, JP;

Eiji Fujii, Osaka, JP;

Assignee:

PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka, JP;

Attorney:

McDermott Will & Emery LLP

Primary Examiner:

Helen Kwok

Int. Cl.
CPC ...
H01L 41/00 (2013.01); B41J 2/045 (2006.01); H01L 41/18 (2006.01); B41J 2/14 (2006.01); G01C 19/5621 (2012.01); H01L 41/09 (2006.01); H01L 41/187 (2006.01); C30B 29/32 (2006.01); C30B 29/68 (2006.01); H01L 41/113 (2006.01); H01L 41/08 (2006.01); H01L 41/314 (2013.01);
U.S. Cl.
CPC ...
H01L 41/183 (2013.01); B41J 2/14201 (2013.01); B41J 2/14233 (2013.01); C30B 29/32 (2013.01); C30B 29/68 (2013.01); G01C 19/5621 (2013.01); H01L 41/0805 (2013.01); H01L 41/0973 (2013.01); H01L 41/113 (2013.01); H01L 41/1132 (2013.01); H01L 41/1873 (2013.01); H01L 41/1878 (2013.01); H01L 41/314 (2013.01); B41J 2202/03 (2013.01);
Abstract

Provided is a piezoelectric thin film including a non-lead-containing (that is, lead-free) ferroelectric material and having high piezoelectric performance comparable to that of PZT, and a method of manufacturing the piezoelectric thin film. The piezoelectric film according to the present invention comprises a laminate structure. The laminate structure comprises an electric film and a (1-x)(Na,Bi)TiO-xBaTiOfilm. x represents a value of not less than 0.03 and not more than 0.15. The (1-x)(Na,Bi)TiO-xBaTiOfilm has a (110) surface orientation only. The (1-x)(Na,Bi)TiO-xBaTiOfilm has an orthorhombic crystal structure only.

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