The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2015
Filed:
Sep. 20, 2013
Applicants:
I-tsang Wu, Tampa, FL (US);
Jing Wang, Tampa, FL (US);
Inventors:
I-Tsang Wu, Tampa, FL (US);
Jing Wang, Tampa, FL (US);
Assignee:
Univerity of South Florida, Tampa, FL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 29/88 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/88 (2013.01); H01L 29/66151 (2013.01);
Abstract
In one embodiment, devices, such as metal-insulator-metal tunneling diodes, are fabricated by forming a cavity in a substrate having a top surface, conformally depositing a thin film of material in the cavity so as to form a thin layer of material on walls of the cavity, and depositing a layer of material to fill the cavity, wherein a top edge of the thin film is exposed and is flush with the top surface of the substrate.