The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2015
Filed:
Nov. 09, 2012
Shenzhen China Star Optoelectronics Technology Co., Ltd., Shenzhen, CN;
Cheng-Lung Chiang, Shenzhen, CN;
Po-Lin Chen, Shenzhen, CN;
SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD., Shenzhen, CN;
Abstract
A TFT array manufacturing method is disclosed herein and includes steps: forming a first metal layer on a substrate; depositing a first insulating layer to cover the first metal layer; forming an oxide semiconductor layer on the first insulating layer in a TFT area; forming a second insulating layer on the first insulating layer and the oxide semiconductor layer; etching the second insulating layer in the TFT area to expose the oxide semiconductor layer and etching the second insulating layer and the first insulating layer in a signal wire area simultaneously to expose the first metal layer; and forming a second metal layer on the second insulating layer of the TFT area, and the second metal layer being connected the oxide semiconductor layer, and forming the second metal layer on the first metal layer of the signal wire area to contact the first metal, layer.