The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2015

Filed:

Oct. 01, 2013
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Inventors:

Tamae Takano, Isehara, JP;

Tetsuya Kakehata, Isehara, JP;

Shunpei Yamazaki, Setagaya, JP;

Assignee:

Semiconductor Enery Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/792 (2006.01); H01L 27/115 (2006.01); H01L 27/105 (2006.01); H01L 27/12 (2006.01); H01L 27/13 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1157 (2013.01); H01L 27/105 (2013.01); H01L 27/11526 (2013.01); H01L 27/11546 (2013.01); H01L 27/11568 (2013.01); H01L 27/1214 (2013.01); H01L 27/1251 (2013.01); H01L 27/13 (2013.01); H01L 29/4234 (2013.01); H01L 29/792 (2013.01); H01L 29/7923 (2013.01);
Abstract

The invention provides a semiconductor device and its manufacturing method in which a memory transistor and a plurality of thin film transistors that have gate insulating films with different thicknesses are fabricated over a substrate. The invention is characterized by the structural difference between the memory transistor and the plurality of thin film transistors. Specifically, the memory transistor and some of the plurality of thin film transistors are provided to have a bottom gate structure while the other thin film transistors are provided to have a top gate structure, which enables the reduction of characteristic defects of the transistor and simplification of its manufacturing process.


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