The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2015

Filed:

Jan. 11, 2011
Applicants:

Byeongju Park, Plainview, NY (US);

Subramanian S. Iyer, Mount Kisco, NY (US);

Chandrasekharan Kothandaraman, Hopewell Junction, NY (US);

Inventors:

Byeongju Park, Plainview, NY (US);

Subramanian S. Iyer, Mount Kisco, NY (US);

Chandrasekharan Kothandaraman, Hopewell Junction, NY (US);

Assignee:

GLOBALFOUNDRIES U.S. 2 LLC, Hopewell Junction, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/525 (2006.01); H01L 27/112 (2006.01); G11C 17/16 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5252 (2013.01); G11C 17/165 (2013.01); G11C 2229/763 (2013.01); H01L 27/11206 (2013.01); H01L 2924/0002 (2013.01); H01L 2924/3011 (2013.01); Y10S 257/928 (2013.01);
Abstract

The present invention provides antifuse structures having an integrated heating element and methods of programming the same, the antifuse structures comprising first and second conductors and a dielectric layer formed between the conductors, where one or both of the conductors functions as both a conventional antifuse conductor and as a heating element for directly heating the antifuse dielectric layer during programming.


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