The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2015

Filed:

Jun. 25, 2008
Applicants:

Akira Hayashida, Toyama, JP;

Masaaki Ueno, Toyama, JP;

Masakazu Shimada, Toyama, JP;

Masashi Sugishita, Toyama, JP;

Toshimitsu Miyata, Toyama, JP;

Kimio Kitamura, Osaka, JP;

Kenji Tanaka, Osaka, JP;

Jyunichi Nishihara, Osaka, JP;

Inventors:

Akira Hayashida, Toyama, JP;

Masaaki Ueno, Toyama, JP;

Masakazu Shimada, Toyama, JP;

Masashi Sugishita, Toyama, JP;

Toshimitsu Miyata, Toyama, JP;

Kimio Kitamura, Osaka, JP;

Kenji Tanaka, Osaka, JP;

Jyunichi Nishihara, Osaka, JP;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/50 (2006.01); C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 22/12 (2013.01); H01L 21/67303 (2013.01); Y10T 29/41 (2015.01);
Abstract

A heating apparatus comprises a heating element, an inner shell for supporting the heating element, an outer shell disposed along the outer boundary of the inner shell, a cooling medium passage for conveying a cooling medium between the inner shell and the outer shell, a first opening provided in the inner shell, a second opening provided in the outer shell, and a partition arranged to extend from the first opening to the second opening for developing at least a space separated from the cooling medium passage and between the inner shell and the outer shell. The heating apparatus further comprises an insulator for shutting up a gap provided between the partition and the second opening.


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