The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2015

Filed:

Jul. 11, 2013
Applicant:

Electronics and Telecommunications Research Institute, Daejeon, KR;

Inventors:

Yong Suk Yang, Daejeon, KR;

In-Kyu You, Daejeon, KR;

Jae Bon Koo, Daejeon, KR;

Yong-Young Noh, Daejeon, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/48 (2006.01); H05K 1/09 (2006.01); H05K 1/03 (2006.01); H05K 1/02 (2006.01); H01L 23/498 (2006.01); H05K 3/40 (2006.01); H05K 3/10 (2006.01); H05K 3/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/4814 (2013.01); H01L 21/4867 (2013.01); H01L 23/49822 (2013.01); H05K 1/0277 (2013.01); H05K 1/0298 (2013.01); H05K 1/0306 (2013.01); H05K 1/0313 (2013.01); H05K 1/09 (2013.01); H05K 3/4069 (2013.01); H01L 2924/0002 (2013.01); H05K 3/105 (2013.01); H05K 3/125 (2013.01); H05K 2203/1105 (2013.01); H05K 2203/125 (2013.01); Y10T 29/4913 (2015.01); Y10T 29/49117 (2015.01); Y10T 29/49126 (2015.01); Y10T 29/49144 (2015.01); Y10T 29/49155 (2015.01); Y10T 29/49165 (2015.01);
Abstract

Provided are a multi-layer interconnection structure and a manufacturing method thereof. The multi-layer interconnection structure includes a substrate; a first wiring on the substrate; an interlayer insulation layer on the first wiring; a second wiring on the interlayer insulation layer; and a via contact including at least one conductive filament penetrating through the interlayer insulation layer between the second wiring and the first wiring to be electrically connected to the first wiring and the second wiring.


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