The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2015
Filed:
Sep. 14, 2012
Tatsuo Kikuchi, Hyogo, JP;
Tatsuo Kikuchi, Hyogo, JP;
Sumitomo Precision Products Co., LTD., Hyogo, JP;
Abstract
A metal filling apparatus fills molten metal into a minute space formed on a surface of a semiconductor wafer. The apparatus has a processor body with a chamber in which the wafer is held, a molten metal supply, and a molten metal recovery mechanism. The supply includes a tank in which molten metal is stored, a supply pipe connected between the chamber and the tank, a supplier interposed in the supply pipe to supply molten metal from the tank to the processing chamber, and the recovery mechanism recovers molten metal from the processing chamber.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile