Optical waveguide production method

Abstract

A plurality of regions for a plurality of optical waveguides are defined on a substrate. Then, optical waveguide under-cladding layers are formed on the respective regions, and dummy under-cladding layers are formed between adjacent ones of the optical waveguide under-cladding layers in a spaced relationship to the optical waveguide under-cladding layers. After cores are formed on the optical waveguide under-cladding layers and the dummy under-cladding layers, an over-cladding layer formation photosensitive resin is applied on the resulting substrate. Subsequently, portions of the resulting photosensitive resin layer for the respective optical waveguides are selectively exposed, and the exposed portions are defined as over-cladding layers. Thus, the optical waveguides are produced as each including the optical waveguide under-cladding layer, the core and the over-cladding layer, and separated from the substrate.