Inertia sensor

Abstract

This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (); means (C, C, C, C, +vd, −vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C, C, C, C) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit () for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., Cand C), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights () are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., Cand C), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit ().