The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2015
Filed:
Dec. 23, 2010
Applicants:
Lars Markwort, Haimhausen, DE;
Ernst Hegels, Kirchheim b. München, DE;
Inventors:
Lars Markwort, Haimhausen, DE;
Ernst Hegels, Kirchheim b. München, DE;
Assignee:
Nanda Technologies GmbH, Unterschleissheim, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04N 7/18 (2006.01); G01N 21/95 (2006.01); H01L 21/68 (2006.01); H01L 23/544 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); H01L 21/681 (2013.01); G01N 21/9503 (2013.01); H01L 23/544 (2013.01); H01L 2223/54493 (2013.01);
Abstract
A wafer inspection system comprises a camera having a field of view, an object mount configured to position at least a portion of surfaceof an objectat an object planerelative to the camera and within the field of view of the camera and at least one surface portioncarrying a multitude of retroreflectorsdisposed at a greater Δd distance from the camera than the object plane and within the field of view of the camera.