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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9181615 B1

PDFFull Text
Date of Patent:
Nov. 10, 2015

Filed:

Oct. 02, 2012

Coating fluid for boron diffusion

Applicant:

Shin-etsu Chemical Co., Ltd., Tokyo, JP;

Inventors:

Shintarou Tsukigata, Annaka, JP;

Toshifumi Matsuoka, Annaka, JP;

Takenori Watabe, Annaka, JP;

Hiroyuki Otsuka, Annaka, JP;

Assignee:

SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;

Attorney:

Westerman, Hattori, Daniels & Adrian, LLP

Primary Examiner:

Bach Dinh

Int. Cl.
CPC ...
H01L 31/042 (2014.01); C23C 10/00 (2006.01); C23C 10/18 (2006.01); C23C 10/60 (2006.01); C23C 28/04 (2006.01); C23C 10/20 (2006.01); H01L 21/22 (2006.01); H01L 31/068 (2012.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
C23C 10/00 (2013.01); C23C 10/18 (2013.01); C23C 10/20 (2013.01); C23C 10/60 (2013.01); C23C 28/042 (2013.01); C23C 28/048 (2013.01); H01L 21/2225 (2013.01); H01L 31/068 (2013.01); H01L 31/1804 (2013.01); Y02E 10/547 (2013.01);
Abstract

A coating fluid comprising a boron compound, an organic binder, a silicon compound, an alumina precursor, and water and/or an organic solvent is used to diffuse boron into a silicon substrate to form a p-type diffusion layer. The coating fluid is spin coated onto the substrate to form a uniform coating having a sufficient amount of impurity whereupon a p-type diffusion layer having in-plane uniformity is formed.

Find Patent Forward Citations

Tsukigata, Shintarou. (2015). Coating fluid for boron diffusion (U.S. Patent No. 9181615). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9181615

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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