The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2015
Filed:
Mar. 02, 2011
Applicants:
Dennis Mortensen, Frederiksberg C, DK;
Pirmin Hermann Otto Rombach, Kongens Lyngby, DK;
Inventors:
Dennis Mortensen, Frederiksberg C, DK;
Pirmin Hermann Otto Rombach, Kongens Lyngby, DK;
Assignee:
Epcos AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 3/00 (2006.01); H04R 19/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00666 (2013.01); B81B 3/0078 (2013.01); H04R 19/005 (2013.01); B81B 2201/0257 (2013.01); B81C 2201/0167 (2013.01); Y10T 29/41 (2015.01); Y10T 428/24802 (2015.01); Y10T 428/249921 (2015.04); Y10T 428/25 (2015.01);
Abstract
The present invention refers to a flat back plate, e.g. for MEMS capacitors e.g. for MEMS microphones. For that the back plate comprises a tensile element that exerts a horizontal tensile stress on its environment.