The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2015

Filed:

Feb. 24, 2014
Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Hideki Shimizu, Oubu, JP;

Takashi Ebigase, Nagoya, JP;

Assignee:

NGK Insulators, Ltd., Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/047 (2006.01); B41J 2/14 (2006.01); H01L 41/09 (2006.01); H01L 41/273 (2013.01); H01L 41/27 (2013.01); H01L 41/083 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0477 (2013.01); B41J 2/14233 (2013.01); H01L 41/0973 (2013.01); H01L 41/187 (2013.01); H01L 41/1871 (2013.01); H01L 41/1876 (2013.01); H01L 41/27 (2013.01); H01L 41/273 (2013.01); B41J 2002/14258 (2013.01); B41J 2202/03 (2013.01); H01L 41/083 (2013.01); Y10T 428/26 (2015.01);
Abstract

In the manufacture of a laminated piezoelectric/electrostrictive element by lamination of a piezoelectric/electrostrictive film and an electrode film containing either platinum or an alloy composed mainly of platinum and having a thickness of 2.0 μm or less, both or either one of yttrium oxide (YO) and cerium oxide (CeO) is added to the electrode film or the piezoelectric/electrostrictive film, and the electrode film and the piezoelectric/electrostrictive film are fired simultaneously. This simultaneously achieves a reduced thickness and improved thermal resistance of the electrode film and a reduced change in piezoelectric/electrostrictive properties with time, thereby producing a piezoelectric/electrostrictive element with good initial piezoelectric/electrostrictive properties and with a small change in the piezoelectric/electrostrictive properties with time.


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