The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2015
Filed:
Mar. 03, 2014
Ngk Insulators, Ltd., Nagoya, JP;
Atsushi Watanabe, Nagoya, JP;
Noboru Nishimura, Nagoya, JP;
NGK Insulators, Ltd., Nagoya, JP;
Abstract
A memberfor semiconductor manufacturing equipment includes a base portionand a ceramic memberformed on the base portion. The ceramic memberof the present invention includes a ceramic basecontaining at least one of magnesium oxide, a magnesium oxide solid solution in which a predetermined component is dissolved in magnesium oxide, and zirconium oxide; and an electrodewhich is arranged on part of the ceramic baseand which contains a ruthenium-aluminum alloy as an electrode component. The ceramic memberis a plate-like member and has a structure in which the electrodeis embedded therein. The electrodeis connected to a feeding memberinserted from the underside of the ceramic member. Electric power is supplied from the feeding member