The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9177688 B1

Expired

Date of Patent:

Nov. 03, 2015

Filed:

Nov. 22, 2011

Carbon nanotube-graphene hybrid transparent conductor and field effect transistor

Applicants:

Ageeth A. Bol, Yorktown Heights, NY (US);

Bhupesh Chandra, Jersey City, NJ (US);

Amal Kasry, White Plains, NY (US);

Ahmed Maarouf, Mohegan Lake, NY (US);

Glenn J. Martyna, Croton on Hudson, NY (US);

George S. Tulevski, White Plains, NY (US);

Inventors:

Ageeth A. Bol, Yorktown Heights, NY (US);

Bhupesh Chandra, Jersey City, NJ (US);

Amal Kasry, White Plains, NY (US);

Ahmed Maarouf, Mohegan Lake, NY (US);

Glenn J. Martyna, Croton on Hudson, NY (US);

George S. Tulevski, White Plains, NY (US);

Assignees:

International Business Machines Corporation, Armonk, NY (US);

Egypt Nanotechnology Center, Cairo, EG;

Attorney:

Ryan, Mason & Lewis, LLP

Primary Examiner:

Daniel H Miller

Int. Cl.

CPC ...

B32B 9/00 (2006.01); H01B 1/04 (2006.01); C01B 31/02 (2006.01); C01B 31/04 (2006.01); C23C 16/26 (2006.01); H01L 51/10 (2006.01); H01L 29/16 (2006.01); H01L 29/778 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); B82Y 10/00 (2011.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); H01L 51/00 (2006.01); H01L 51/05 (2006.01); H01L 29/06 (2006.01);

U.S. Cl.

CPC ...

H01B 1/04 (2013.01); B82Y 10/00 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 31/022 (2013.01); C01B 31/0438 (2013.01); C01B 31/0453 (2013.01); C01B 31/0476 (2013.01); C23C 16/26 (2013.01); H01L 29/1606 (2013.01); H01L 29/66742 (2013.01); H01L 29/778 (2013.01); H01L 29/78618 (2013.01); H01L 29/78684 (2013.01); H01L 29/78696 (2013.01); H01L 51/102 (2013.01); H01L 51/105 (2013.01); C01B 2202/00 (2013.01); C01B 2204/00 (2013.01); H01L 29/0673 (2013.01); H01L 51/0048 (2013.01); H01L 51/0545 (2013.01); H01L 51/0566 (2013.01); Y10T 428/30 (2015.01);

Abstract

A nanotube-graphene hybrid film and method for forming a cleaned nanotube-graphene hybrid film. The method includes depositing nanotube film over a substrate to produce a layer of nanotube film, removing impurities from a surface of the layer of nanotube film not contacting the substrate to produce a cleaned layer of nanotube film, depositing a layer of graphene over the cleaned layer of nanotube film to produce a nanotube-graphene hybrid film, and removing impurities from a surface of the nanotube-graphene hybrid film to produce a cleaned nanotube-graphene hybrid film, wherein the hybrid film has improved electrical performance. Another method includes depositing nanotube film over a metal foil to produce a layer of nanotube film, placing the metal foil with as-deposited nanotube film in a chemical vapor deposition furnace to grow graphene on the nanotube film to form a nanotube-graphene hybrid film, and transferring the nanotube-graphene hybrid film over a substrate.

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