The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2015

Filed:

Oct. 01, 2010
Applicants:

Tetsuji Imamura, Toyama, JP;

Daisuke Kuwahara, Toyama, JP;

Inventors:

Tetsuji Imamura, Toyama, JP;

Daisuke Kuwahara, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 29/78 (2006.01); G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/12 (2013.01);
Abstract

Provided herein are a gas sensor element in which deformation of a sensitive portion due to stress may be reduced and a method of manufacturing the gas sensor element. A base insulating layerincluding a heater wiring patternis formed on a front surfaceA of a support. The base insulating layerincludes a fixed portionfixed to the front surfaceA of the support, and a nonfixed portionlocated over an opening portion. A cavity portionhaving the opening portionis formed in the support. An electrode wiring patternand a sensitive filmare formed over a central portionof the nonfixed portionof the base insulating layer. The nonfixed portionincludes the central portionand a plurality of connecting portionsconnecting the central portionand the fixed portion. Four connecting portionseach include a base portionand an extended portion. The base portionof each connecting portionis formed to extend along an edge portionA of the opening portion. Each extended portionis formed to extend from the base portionto the central portionto be connected to the central portion. The connecting portionsare formed such that the maximum width Wof each base portionis larger than the maximum width Wof each extended portions


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