The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2015
Filed:
Oct. 01, 2013
Freescale Semiconductor, Inc., Austin, TX (US);
Chad S. Dawson, Queen Creek, AZ (US);
Peter T. Jones, Scottsdale, AZ (US);
FREESCALE SEMICONDUCTOR, INC., Austin, TX (US);
Abstract
A pressure sensor () includes a test cell () and sense cell (). The sense cell () includes an electrode () formed on a substrate () and a sense diaphragm () spaced apart from the electrode () to produce a sense cavity (). The test cell () includes an electrode () formed on the substrate () and a test diaphragm () spaced apart from the electrode () to produce a test cavity (). Both of the cells () are sensitive to pressure (). However, a critical dimension () of the sense diaphragm () is less than a critical dimension () of the test diaphragm () so that the test cell () has greater sensitivity () to pressure () than the sense cell (). Parameters () measured at the test cell () are utilized to estimate a sensitivity () of the sense cell ().