The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2015

Filed:

Oct. 03, 2013
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Shogo Inaba, Shiojiri, JP;

Kyo Horie, Okaya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/10 (2006.01); G01P 15/097 (2006.01); G01P 15/18 (2013.01); G01L 1/14 (2006.01); H03H 9/24 (2006.01);
U.S. Cl.
CPC ...
G01L 1/10 (2013.01); G01L 1/14 (2013.01); G01P 15/097 (2013.01); G01P 15/18 (2013.01); H03H 9/2457 (2013.01);
Abstract

A sensor includes a flexible wafer substrate and an oscillator provided on a principal surface of the wafer substrate, and the oscillator deforms when an external force is applied to the wafer substrate.


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