The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2015

Filed:

Feb. 08, 2013
Applicant:

Sinfonia Technology Co., Ltd., Tokyo, JP;

Inventors:

Mitsuo Natsume, Tokyo, JP;

Atsushi Suzuki, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65B 1/04 (2006.01); B08B 9/093 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B08B 9/093 (2013.01); H01L 21/67393 (2013.01); H01L 21/67775 (2013.01);
Abstract

A purge nozzle unitincludes a nozzle main bodyincluding a trunkand a collar sectionprotruding outward from the trunkand a holderincluding a side wallthat is in slidable contact with an outward face of the collar sectionand a bottom wallhaving a through holewith which an outward face of the trunkis in slidable contact and is configured such that a ventin communication with the outside is formed in the holderand the nozzle main bodyis vertically moved relative to the holderby regulating a pressure in a pressure-regulated space S formed between the nozzle main bodyand the holderand in communication with the vent


Find Patent Forward Citations

Loading…