The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2015
Filed:
Aug. 19, 2013
Harris Corporation, Melbourne, FL (US);
John E. Rogers, Gainesville, FL (US);
Harris Corporation, Melbourne, FL (US);
Abstract
Integrated Microelectromechanical System ('MEMS') devices and methods for making the same. The integrated MEMS device comprises a substrate () with first electronic circuitry () formed thereon, as well as a MEMS filter device (). The MEMS filter device has a transition portion () configured to (a) electrically connect the MEMS filter device to second electronic circuitry and (b) suspend the MEMS filter device over the substrate such that a gas gap exists between the substrate and the MEMS filter device. The transition portion comprises a three dimensional hollow ground structure () in which an elongate center conductor () is suspended. The RF MEMS filter device also comprises at least two adjacent electronic elements () which are electrically isolated from each other via a ground structure of the transition portion, and placed in close proximity to each other.