The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2015
Filed:
Mar. 19, 2014
Applicant:
Yokogawa Electric Corporation, Musashino-shi, Tokyo, JP;
Inventor:
Kazuma Takenaka, Musashino, JP;
Assignee:
YOKOGAWA ELECTRIC CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); G01L 5/16 (2006.01); G01L 9/00 (2006.01); G01L 9/06 (2006.01); G01L 1/16 (2006.01); G01L 1/18 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
H01L 29/84 (2013.01); G01L 1/16 (2013.01); G01L 1/18 (2013.01); G01L 5/162 (2013.01); G01L 5/167 (2013.01); G01L 9/008 (2013.01); G01L 9/0052 (2013.01); G01L 9/06 (2013.01); H01L 29/1602 (2013.01);
Abstract
A force detection device includes a diamond piezoresistor including a highly orientated diamond into which boron is introduced as an impurity. The absolute value of the piezoresistance coefficient of the diamond piezoresistor is greater than the absolute value of a piezoresistance coefficient π11 or π12 in a case in which a major axis is in the <100> direction.