The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2015

Filed:

Jan. 20, 2014
Applicants:

Scott M. Zimmerman, Basking Ridge, NJ (US);

Karl W. Beeson, Princeton, NJ (US);

William R. Livesay, San Diego, CA (US);

Richard L. Ross, Del Mar, CA (US);

Inventors:

Scott M. Zimmerman, Basking Ridge, NJ (US);

Karl W. Beeson, Princeton, NJ (US);

William R. Livesay, San Diego, CA (US);

Richard L. Ross, Del Mar, CA (US);

Assignee:

Goldeneye, Inc., San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/20 (2006.01); H01L 21/20 (2006.01); H01L 31/0392 (2006.01); H01L 31/18 (2006.01); H01L 33/32 (2010.01); C30B 25/18 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
H01L 29/2003 (2013.01); C30B 25/18 (2013.01); H01L 21/2007 (2013.01); H01L 31/0392 (2013.01); H01L 31/1836 (2013.01); H01L 31/1852 (2013.01); H01L 33/32 (2013.01); H01L 33/007 (2013.01); Y02E 10/544 (2013.01);
Abstract

Flexible semiconductor devices based on flexible freestanding epitaxial elements are disclosed. The flexible freestanding epitaxial elements provide a virgin as grown epitaxy ready surface for additional growth layers. These flexible semiconductor devices have reduced stress due to the ability to flex with a radius of curvature less than 100 meters. Low radius of curvature flexing enables higher quality epitaxial growth and enables 3D device structures. Uniformity of layer formation is maintained by direct absorption of actinic radiation by the flexible freestanding epitaxial element within a reactor. In addition, standard post processing steps like lithography are enabled by the ability of the devices and elements to be flattened using a secondary support element or vacuum. Finished flexible semiconductor devices can be flexed to a radius of curvature of less than 100 meters. Nitrides, Zinc Oxides, and their alloys are preferred materials for the flexible freestanding epitaxial elements.


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