The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2015

Filed:

Sep. 11, 2014
Applicant:

Panasonic Intellectual Property Management Co., Ltd., Chuo-ku, Osaka-shi, JP;

Inventors:

Keiichi Matsuzaki, Kyoto, JP;

Teruhiro Shiono, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
G02B 21/0032 (2013.01); G02B 21/0052 (2013.01);
Abstract

A scanning optical microscope includes a light source; a first beam splitter that splits light into irradiation light and reference light; a first objective lens that converges the irradiation light on a sample and receives signal light; a second beam splitter that splits the signal light off from an optical path; a pin hole positioned on an optical path of the split signal light at a position optically conjugate with an image-forming point of the first objective lens; a condenser lens that converges the split signal light on the pin hole; a phase plate that outputs first light including at least four firstly-split beams having different phases; a third beam splitter that multiplexes the first light and second light to generate interfering light including at least four secondly-split beams having different phases; and a light detecting element that receives the interfering light and outputs at least four electric signals.


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