The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2015
Filed:
Aug. 06, 2013
International Business Machines Corporation, Armonk, NY (US);
Kelly Malone, Newburgh, NY (US);
Brian L. Walsh, New Paltz, NY (US);
GLOBALFOUNDRIES U.S.2 LLC, Hopewell Junction, NY (US);
Abstract
An arrangement of semiconductor devices to monitor semiconductor defects. There is a first semiconductor device arranged in proximity to a second semiconductor device, the second semiconductor device having a plurality of temperature sensing devices at locations in the second semiconductor device; a plurality of through silicon vias extending between the first semiconductor device and the second semiconductor device to electrically connect the first semiconductor device to the second semiconductor device; and a testing program to cause the plurality of temperature sensing devices in the second semiconductor device to sense the temperature at a plurality of corresponding locations in the first semiconductor device such that a predetermined rise in temperature at one location of the plurality of temperature sensing devices in the second semiconductor device is indicative of a defect in the corresponding location in the first semiconductor device. Methods of monitoring defects are also disclosed.