The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2015

Filed:

Dec. 05, 2012
Applicant:

Horiba, Ltd., Kyoto, JP;

Inventors:

Kentaro Nishikata, Kyoto, JP;

Satoshi Ohashi, Kyoto, JP;

Takashi Komatsubara, Kyoto, JP;

Assignee:

HORIBA, LTD, , JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/225 (2006.01); G01N 23/223 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2252 (2013.01); G01N 23/223 (2013.01); G01N 2223/076 (2013.01);
Abstract

The X-ray analyzer repeats scanning of a sample by an electron beam from an electron gun (beam source), detects a characteristic X-ray from the sample by an X-ray detector, generates an element distribution image of the sample by a signal processor every scanning, and stores a plurality of element distribution images in a sequential order. Temporal changes of the element distribution image of the sample are obtained. Moreover, by moving a stage by a moving unit concurrently with the scanning, an element distribution image of the sample where the scanning position is varied is obtained. By generating the element distribution image while varying the scanning position, positioning of the range where the element distribution image is to be obtained on the sample can be quickly performed based on the element distribution image itself.


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