The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2015

Filed:

Mar. 28, 2013
Applicant:

Yokogawa Electric Corporation, Musashino-shi, Tokyo, JP;

Inventors:

Yasushi Ichizawa, Musashino, JP;

Kumiko Horikoshi, Musashino, JP;

Kazuki Setsuda, Musashino, JP;

Naomichi Chida, Musashino, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/3559 (2014.01); G01N 21/59 (2006.01); G01N 21/86 (2006.01); G01J 5/02 (2006.01); G01N 21/31 (2006.01);
U.S. Cl.
CPC ...
G01N 21/3559 (2013.01); G01N 21/59 (2013.01); G01N 21/86 (2013.01); G01N 2021/3148 (2013.01); G01N 2021/3174 (2013.01); G01N 2021/3181 (2013.01); G01N 2021/8663 (2013.01); G01N 2201/0627 (2013.01);
Abstract

A material property measuring apparatus includes a radiation source irradiator configured to irradiate a measurement target material with radiation beams having n different wavelengths, a detector configured to detect intensities of radiation beams having the respective wavelengths after the irradiation of the measurement target material, and a processing unit configured to correct the detected intensity of the radiation beam having at least a part of the respective wavelengths using a correction coefficient in which rows and columns are respectively represented by a matrix of an order of n or less, and to calculate an index value indicating a property of the measurement target material on the basis of relative intensities of the radiation beams having the respective wavelengths after the correction.


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