The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2015

Filed:

Feb. 20, 2013
Applicant:

Fujikin Incorporated, Osaka-shi, JP;

Inventors:

Ryuji Yogo, Osaka, JP;

Izuru Shikata, Osaka, JP;

Mutsunori Koyomogi, Osaka, JP;

Megumu Makino, Osaka, JP;

Takahiro Matsuda, Osaka, JP;

Assignee:

FUJIKIN INCORPORATED, Osaka-shi, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
F16K 27/00 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
F16K 27/003 (2013.01); C23C 16/45561 (2013.01); Y10T 137/4259 (2015.04); Y10T 137/87885 (2015.04);
Abstract

A purge line changing block joint for enabling supply of different types of purge gas between lines without a significant remodeling of a fluid control apparatus and the fluid control apparatus is provided. A purge line changing block joint is connected to an upper side of a three-way valve channel portion in at least one line of the plurality of lines. The purge line changing block joint includes a process gas inlet channel communicating with a process gas inlet channel of the three-way valve channel portion, an outlet channel communicating the process gas inlet channel and an outlet channel of the three-way valve channel portion, a channel terminal not in communication with a purge gas inlet channel of the three-way valve channel portion but terminating the same, and a new purge gas inlet channel communicating with the outlet channel and opening on the top surface.


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