The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2015
Filed:
Mar. 23, 2012
Junggeun OH, Seoul, KR;
Kwangho Lee, Changwon-si, KR;
Jangwoo Lee, Seoul, KR;
Jeonggyu Kim, Changwon-si, KR;
Jinhyouk Shin, Seoul, KR;
Junggeun Oh, Seoul, KR;
Kwangho Lee, Changwon-si, KR;
Jangwoo Lee, Seoul, KR;
Jeonggyu Kim, Changwon-si, KR;
Jinhyouk Shin, Seoul, KR;
LG ELECTRONICS INC., Seoul, KR;
Abstract
There is disclosed a plasma enhanced chemical vapor deposition apparatus including a loading station to load an object on a pallet, an operation station to form a functional film by performing plasma reaction to the object loaded on the pallet, a unloading station to separate the object from the pallet, a circulation station to convey the pallet from the unloading station to the loading station, and a conveyer to convey the pallet to the stations sequentially to circulate the pallet.