The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2015

Filed:

Sep. 01, 2011
Applicants:

Sonke Siebels, Hamburg, DE;

Sebastian Kytzia, Hamburg, DE;

Inventors:

Sonke Siebels, Hamburg, DE;

Sebastian Kytzia, Hamburg, DE;

Assignee:

KHS Corpoplast GmbH, Hamburg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/511 (2006.01); H05H 1/24 (2006.01); C23C 16/02 (2006.01); C23C 16/04 (2006.01); C23C 16/40 (2006.01); C23C 16/503 (2006.01); C23C 16/515 (2006.01); C23C 16/52 (2006.01);
U.S. Cl.
CPC ...
C23C 16/511 (2013.01); C23C 16/029 (2013.01); C23C 16/045 (2013.01); C23C 16/047 (2013.01); C23C 16/401 (2013.01); C23C 16/503 (2013.01); C23C 16/515 (2013.01); C23C 16/52 (2013.01);
Abstract

A method for the plasma treatment of a workpiece that includes inserting the workpiece into a plasma chamber and depositing, with the effect of a partial vacuum after plasma ignition, a coating on the workpiece by plasma treatment. Plasma ignition occurs by pulsed microwave energy, and alternating 'on' phase times and 'off' phase times from pulsed microwave excitation are provided by a control. During a beginning portion of the plasma treatment, a first portion of the coating is deposited. Subsequently, a quotient of the “on” phase times and the “off” phase times is increased to deposit a second portion of the coating, which has a different composition than the first portion of the coating. The quotient of the “on” phase times and the “off” phase times is then decreased to form a third portion of the coating, which has a different composition than the second portion of the coating.


Find Patent Forward Citations

Loading…