The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2015
Filed:
Nov. 17, 2006
Applicant:
Gareth David Stanton, North Somerset, GB;
Inventor:
Gareth David Stanton, North Somerset, GB;
Assignee:
Edwards Limited, Crawley, West Sussex, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4481 (2013.01); C23C 16/4412 (2013.01); Y02C 20/30 (2013.01);
Abstract
Chemical vapor deposition apparatus comprises a process chamber, a bubbler for supplying a volatile precursor to the chamber, a vacuum pump for drawing an exhaust gas from the process chamber, an abatement device for treating the exhaust gas, and a bypass line for conveying the precursor from the bubbler to the abatement device, the bypass line bypassing both the process chamber and the vacuum pump.