The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2015
Filed:
Sep. 11, 2013
International Business Machines Corporation, Armonk, NY (US);
Yann Astier, White Plains, NY (US);
Jingwei Bai, Elmsford, NY (US);
Satyavolu Papa Rao, Poughkeepsie, NY (US);
Kathleen Reuter, Yorktown Heights, NY (US);
Joshua T. Smith, Croton on Hudson, NY (US);
GLOBALFOUNDRIES U.S. 2 LLC, Hopewell Junction, NY (US);
Abstract
Solid state nanopore devices for nanopore applications and methods of manufacture are disclosed herein. The method includes forming a membrane layer on an underlying substrate. The method further includes forming a hole in the membrane layer. The method further comprises plugging the hole with a sacrificial material. The method further includes forming a membrane over the sacrificial material. The method further includes removing the sacrificial material within the hole and portions of the underlying substrate. The method further includes drilling an opening in the membrane, aligned with the hole.